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Ion Implantation


7. Ion implantation - a surface modification process in which the alloying material is ionized, accelerated by an electric field, and implanted into the subsurface layer of the substrate. This definition also includes processes in which ion implantation is carried out simultaneously with physical vapor deposition obtained by electron beam heating or with sputtering deposition

Source: Presidential Decree of the Russian Federation dated 17.12.2011 No. 1661 "On Approval of the List of Dual-Use Goods and Technologies That May Be Used in the Production of Weapons and Military Equipment and Subject to Export Controls"

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