Chemical vapor deposition
1. Chemical vapor deposition (CVD) - a process of applying an external coating or surface modification coating, where metal, alloy, composite material, dielectric or ceramic is deposited on a heated substrate. Gaseous reagents are decomposed or combined near the substrate or on the substrate itself, resulting in the desired material being deposited on it in the form of a chemical element, alloy or compound. The energy for these chemical reactions can be provided by the heat of the substrate, glow discharge plasma or a laser beam.
Source: Order of the Federal Customs Service of Russia dated 27.03.2012 No. 575 (as amended on 30.10.2012) "On Control of the Export of Dual-Use Goods and Technologies That May Be Used in the Production of Weapons and Military Equipment and Subject to Export Controls"
1. Chemical vapor deposition is a process of applying a purely external coating or a coating with modification of the surface being coated, when metal, alloy, composite material, dielectric or ceramic is applied to a heated article. Gaseous reagents are decomposed or combined on the surface of the article, resulting in the formation of desired elements, alloys or compounds on it. The energy for such decomposition or chemical reaction can be provided by heating the article using plasma discharge or laser beam
Source: Order of the Russian Customs Service dated 24.12.2001 No. 1226 (as amended on 17.01.2012) "On introducing amendments to certain regulatory and other legal acts of the Russian Customs Service"
Понятие «химическое осаждение из паровой фазы» среднего рода.
| Падеж | Единственное число | Множественное число |
|---|---|---|
| Р | химического осаждения из парового фазы | химического осаждения из парового фазы |
| Д | химическому осаждению из паровому фазы | химическому осаждению из паровому фазы |
| В | химическое осаждение из паровое фазы | химическое осаждение из паровое фазы |
| Т | химическим осаждением из паровым фазы | химическим осаждением из паровым фазы |
| П | химическом осаждении из паровом фазы | химическом осаждении из паровом фазы |